MEMS-based thin palladium membrane microreactors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6032, Issue , 2006, Pages

  Ye, S Y ^a   Tanaka, S ^b   Esashi, M ^b   Hamakawa, S ^a   Hanaoka, T ^a   Mizukami, F ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Hydrogen permeation; Hydrogenation dehydrogenation reaction; Micro electromechanical system (mems); Palladium membrane; Porous silicon, microreactor

Indexed keywords

DEHYDROGENATION; HYDROGENATION; MECHANICAL PERMEABILITY; MEMBRANES; PALLADIUM; POROUS SILICON;

HYDROGEN PERMEATION; HYDROGENATION/DEHYDROGENATION REACTIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PALLADIUM MEMBRANES; POROUS SILICON, MICROREACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 33645227632     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.667851     Document Type: Conference Paper

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