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Volumn 43, Issue 15, 2004, Pages 4182-4187

Microfabricated palladium-silver alloy membranes and their application in hydrogen separation

Author keywords

[No Author keywords available]

Indexed keywords

DEHYDROGENATION; HYDROGEN; PERMSELECTIVE MEMBRANES; PRESSURE EFFECTS; SEPARATION; SILICON WAFERS;

EID: 3242737465     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie034293r     Document Type: Article
Times cited : (42)

References (35)
  • 2
    • 0035891321 scopus 로고    scopus 로고
    • Materials for fuel-cell technology
    • Steele, B. H. C.; Heinzel, A. Materials for Fuel-Cell Technology. Nature 2001, 414, 338-344.
    • (2001) Nature , vol.414 , pp. 338-344
    • Steele, B.H.C.1    Heinzel, A.2
  • 3
    • 3242657723 scopus 로고    scopus 로고
    • United States Department of Energy: Washington, DC, Nov 15-16
    • A Review of the National Hydrogen Vision Meeting; United States Department of Energy: Washington, DC, Nov 15-16, 2001.
    • (2001) A Review of the National Hydrogen Vision Meeting
  • 5
    • 0035891408 scopus 로고    scopus 로고
    • Alternative energy technologies
    • Dresselhaus, M. S.; Thomas, I. L. Alternative energy technologies. Nature 2001, 414, 332.
    • (2001) Nature , vol.414 , pp. 332
    • Dresselhaus, M.S.1    Thomas, I.L.2
  • 7
    • 0035839710 scopus 로고    scopus 로고
    • Membrane reactors for hydrogenation and dehydrogenation processes based on supported palladium
    • Dittmeyer, R.; Hollein, V.; Daub, K. Membrane Reactors for Hydrogenation and Dehydrogenation Processes based on Supported Palladium. J. Mol. Catal. A: Chem. 2001, 173, 35.
    • (2001) J. Mol. Catal. A: Chem. , vol.173 , pp. 35
    • Dittmeyer, R.1    Hollein, V.2    Daub, K.3
  • 8
    • 0029140868 scopus 로고
    • Novel preparation technique for thin metal-ceramic composite membranes
    • King, L. Y.; Varma, A. Novel Preparation Technique for Thin Metal-Ceramic Composite Membranes. AIChE J. 1995, 41 (9), 2131.
    • (1995) AIChE J. , vol.41 , Issue.9 , pp. 2131
    • King, L.Y.1    Varma, A.2
  • 9
    • 0037447679 scopus 로고    scopus 로고
    • Preparation and characterization of Pd-Cu composite membranes for hydrogen separation
    • Roa, F.; Way, J. D.; McCormick, R. L.; Paglieri, S. N. Preparation and Characterization of Pd-Cu Composite Membranes for Hydrogen Separation. J. Chem. Eng. 2003, 93, 11.
    • (2003) J. Chem. Eng. , vol.93 , pp. 11
    • Roa, F.1    Way, J.D.2    McCormick, R.L.3    Paglieri, S.N.4
  • 10
    • 0031839767 scopus 로고    scopus 로고
    • CVD synthesis gas permeation properties of thin palladium/alumina membranes
    • Xomeritakis, G.; Lin, Y. S. CVD Synthesis and Gas Permeation Properties of thin Palladium/Alumina membranes. AIChE J. 1998, 44, 174.
    • (1998) AIChE J. , vol.44 , pp. 174
    • Xomeritakis, G.1    Lin, Y.S.2
  • 11
    • 0035387723 scopus 로고    scopus 로고
    • Pd-Ag membranes on porous alumina substrates by unbalanced magnetron sputtering
    • Brien, J. O.; Hughes, R.; Hisek, J. Pd-Ag Membranes on porous Alumina Substrates by Unbalanced Magnetron Sputtering. Surf. Coat. Technol. 2001, 142, 253.
    • (2001) Surf. Coat. Technol. , vol.142 , pp. 253
    • Brien, J.O.1    Hughes, R.2    Hisek, J.3
  • 12
    • 0032513381 scopus 로고    scopus 로고
    • High-selectivity, high-flux silica membranes for gas separation
    • Vos, R. M.; Verweij, H. High-Selectivity, High-Flux Silica Membranes for Gas Separation. Science 1998, 279, 1710.
    • (1998) Science , vol.279 , pp. 1710
    • Vos, R.M.1    Verweij, H.2
  • 13
    • 0026433724 scopus 로고
    • Microfabrication techniques for integrated sensors and microsystems
    • Wise, K. D.; Najafi, K. Microfabrication Techniques for Integrated Sensors and Microsystems. Science 1991, 254, 1335.
    • (1991) Science , vol.254 , pp. 1335
    • Wise, K.D.1    Najafi, K.2
  • 14
    • 0032665524 scopus 로고    scopus 로고
    • Palladium based membranes for hydrogen separation and hydrogenation/dehydrogenation
    • Frank, A. J.; Jensen, K. F.; Schmidt, M. A. Palladium Based Membranes for Hydrogen Separation and Hydrogenation/ Dehydrogenation. Proc.-IEEE Micro Electro Mech. Syst. 1999, 382.
    • (1999) Proc.-IEEE Micro Electro Mech. Syst. , pp. 382
    • Frank, A.J.1    Jensen, K.F.2    Schmidt, M.A.3
  • 16
    • 0037301494 scopus 로고    scopus 로고
    • Towards a palladium micro-membrane for the water gas shift reaction: Microfabrication approach and hydrogen purification results
    • Karnik, S. V.; Hatalis, M. K.; Kothare, M. V. Towards a Palladium Micro-Membrane for the Water Gas Shift Reaction: Microfabrication Approach and Hydrogen Purification Results. J. Microelectromech. Syst. 2003, 1, 93.
    • (2003) J. Microelectromech. Syst. , vol.1 , pp. 93
    • Karnik, S.V.1    Hatalis, M.K.2    Kothare, M.V.3
  • 17
    • 0030487321 scopus 로고    scopus 로고
    • LPCVD silicon-rich silicon nitride films for applications in micromechanics studied with statistical experimental design
    • Gardeniers, J. G. E.; Tilman, H.; Visser, C. C. G. LPCVD Silicon-Rich Silicon Nitride Films for Applications in Micromechanics, Studied with Statistical Experimental Design. J. Vac. Sci. Technol., A 1996, 14, 2879.
    • (1996) J. Vac. Sci. Technol., A , vol.14 , pp. 2879
    • Gardeniers, J.G.E.1    Tilman, H.2    Visser, C.C.G.3
  • 18
    • 0000052990 scopus 로고
    • Vertical etching of silicon at very high aspect ratios
    • Kendall, D. L. Vertical etching of silicon at very high aspect ratios. Rev. Instrum. Sci. 1979, 9, 373.
    • (1979) Rev. Instrum. Sci. , vol.9 , pp. 373
    • Kendall, D.L.1
  • 19
    • 0031098187 scopus 로고    scopus 로고
    • Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining
    • Rijn, C. J. M.; Wekken, M.; Nijdam, W.; Elwenspoek, M. C. Deflection and Maximum Load of Microfiltration Membrane Sieves Made with Silicon Micromachining. J. Microelectromech. Syst. 1997, 6, 48.
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 48
    • Rijn, C.J.M.1    Wekken, M.2    Nijdam, W.3    Elwenspoek, M.C.4
  • 21
    • 0345129997 scopus 로고    scopus 로고
    • Model of hydrogen permeation behavior in palladium membrane
    • Ward, T. L.; Dao, T. Model of Hydrogen Permeation Behavior in Palladium Membrane. J. Membr. Sci. 1999, 153, 211.
    • (1999) J. Membr. Sci. , vol.153 , pp. 211
    • Ward, T.L.1    Dao, T.2
  • 24
    • 0035482271 scopus 로고    scopus 로고
    • Microporous and dense inorganic membrane: Current status and prospective
    • Lin, Y. S. Microporous and Dense Inorganic Membrane: Current Status and Prospective. Sep. Purif. Technol. 2001, 25, 39.
    • (2001) Sep. Purif. Technol. , vol.25 , pp. 39
    • Lin, Y.S.1
  • 25
    • 0027791067 scopus 로고
    • Preparation and characterization of a composite palladium-ceramic membrane
    • Collins, J. P.; Douglas, J. D. Preparation and Characterization of a Composite Palladium-Ceramic Membrane. Ind. Eng. Chem. Res. 1993, 32, 3006.
    • (1993) Ind. Eng. Chem. Res. , vol.32 , pp. 3006
    • Collins, J.P.1    Douglas, J.D.2
  • 26
    • 0035863964 scopus 로고    scopus 로고
    • An economic feasibility study for water gas shift membrane reactor
    • Criscuoli, A.; Basile, A.; Drioli, E.; Loiacono, O. An Economic Feasibility Study for Water Gas Shift Membrane Reactor. J. Membr. Sci. 2001, 181, 21.
    • (2001) J. Membr. Sci. , vol.181 , pp. 21
    • Criscuoli, A.1    Basile, A.2    Drioli, E.3    Loiacono, O.4
  • 28
    • 0033283990 scopus 로고    scopus 로고
    • Hydrogen treatment (processing) of materials: Current status and prospects
    • Goltsov, V. A. Hydrogen Treatment (Processing) of Materials: Current Status and Prospects. J. Alloys Compd. 1999, 293-295, 844.
    • (1999) J. Alloys Compd. , vol.293-295 , pp. 844
    • Goltsov, V.A.1
  • 29
    • 0022704497 scopus 로고
    • Hydrogen permeable palladium membrane catalysts. An aid to the efficient production of ultra-pure chemical and pharmaceuticals
    • Gryaznov, V. M. Hydrogen Permeable Palladium Membrane Catalysts. An Aid to the Efficient Production of Ultra-pure Chemical and Pharmaceuticals. Platinum Met. Rev. 1986, 30, 68.
    • (1986) Platinum Met. Rev. , vol.30 , pp. 68
    • Gryaznov, V.M.1
  • 32
    • 0037138968 scopus 로고    scopus 로고
    • Future directions of membrane gas separation technology
    • Baker, R. W. Future Directions of Membrane Gas Separation Technology. Ind. Eng. Chem. Res. 2002, 41, 1393.
    • (2002) Ind. Eng. Chem. Res. , vol.41 , pp. 1393
    • Baker, R.W.1
  • 34
    • 0035872648 scopus 로고    scopus 로고
    • Palladium membrane reactor for the dehydrogenation of ethylbenzene to styrene
    • She, Y.; Han, J.; Ma, Y. H. Palladium Membrane Reactor for the Dehydrogenation of Ethylbenzene to Styrene. Catal. Today 2001, 67, 43.
    • (2001) Catal. Today , vol.67 , pp. 43
    • She, Y.1    Han, J.2    Ma, Y.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.