Microporous silicon connected with silicon wires

Semiconductor Science and Technology

Volumn 21, Issue 4, 2006, Pages 498-500

  Du, X W ^a   Lu, Y W ^a   Kulinich, S A ^b   Sun, J ^a   Yao, P ^a  

^a TIANJIN UNIVERSITY   (China)

^b UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ELECTROCHEMISTRY; ETCHING; MICROPOROUS MATERIALS; OPTICAL FIBER FABRICATION; WIRE;

CHEMICAL ETCHING; DEPLETION LAYERS; ELECTROCHEMICAL ANODIZATION; SILICON WIRES;

SEMICONDUCTING SILICON;

EID: 33644985615     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/4/014     Document Type: Article

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