Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks

Applied Physics Letters

Volumn 88, Issue 10, 2006, Pages

  Bennis, A ^a   Lomonosov, A M ^b   Shen, Z H ^b   Hess, P ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BOUNDARY ELEMENT METHOD; CRYSTAL STRUCTURE; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; LASERS; MECHANICAL PROPERTIES; SILICON COMPOUNDS; WSI CIRCUITS;

DISPERSION; ELASTIC PROPERTIES; FILM PROPERTIES; LASER PROBE-BEAM-DEFLECTION;

POLYSILICON;

EID: 33644905556     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2181187     Document Type: Article

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