Application of laser driven fast high density plasma blocks for ion implantation

Laser and Particle Beams

Volumn 23, Issue 4, 2005, Pages 467-473

  Sari, Amir H ^a   Osman, F ^b   Doolan, K R ^b   Ghoranneviss, M ^a   Hora, H ^c   Hopfl R ^d   Benstetter, G ^d   Hantehzadeh, M H ^a  

^a ISLAMIC AZAD UNIVERSITY   (Iran)

^b UNIVERSITY OF WESTERN SYDNEY   (Australia)

^c UNIVERSITY OF NEW SOUTH WALES   (Australia)

^d DEGGENDORF INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Application to nanotechnology; Block acceleration of particles by lasers; Intense electron beams; Intense ion beams; Laser ion source; Skin layer acceleration

Indexed keywords

GALLIUM COMPOUNDS; IONS; IRRADIATION; LASERS; POLYMERS; SEMICONDUCTOR MATERIALS; SILICON; SKIN EFFECT; SOLAR CELLS;

APPLICATION TO NANOTECHNOLOGY; BLOCK ACCELERATION OF PARTICLES BY LASERS; INTENSE ELECTRON BEAMS; INTENSE ION BEAMS; LASER ION SOURCE; MICRO-ELECTRONICS; SKIN LAYER ACCELERATION;

ION IMPLANTATION;

EID: 33644900963     PISSN: 02630346     EISSN: 1469803X     Source Type: Journal    
DOI: 10.1017/S0263034605050652     Document Type: Conference Paper

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