Measuring surface topography by scanning electron microscopy. II. Analysis of three estimators of surface roughness in second dimension and third dimension

Microscopy and Microanalysis

Volumn 12, Issue 2, 2006, Pages 178-186

  Bonetto, Rita Dominga ^a   Ladaga, Juan Luis ^b   Ponz, Ezequiel ^a  

^a DEPARTAMENTO DE QUÍMICA   (Argentina)

^b UNIVERSIDAD NACIONAL DEL CENTRO DE LA PROVINCIA DE BUENOS AIRES   (Argentina)

Author keywords

Dynamic programming; Fractal dimension; SEM; Stereomicroscopy; Surface roughness

Indexed keywords

ARTICLE; CHEMICAL STRUCTURE; ELECTRON PROBE MICROANALYSIS; FRACTAL ANALYSIS; IMAGE PROCESSING; METHODOLOGY; PARTICLE SIZE; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY;

ELECTRON PROBE MICROANALYSIS; FRACTALS; IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, SCANNING; MODELS, MOLECULAR; PARTICLE SIZE; REPRODUCIBILITY OF RESULTS; SURFACE PROPERTIES;

EID: 33644856029     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S143192760606003X     Document Type: Article

References (22)

1. BARNSLEY, M.F., DEVANEY, R.L., MANDELBROT, B.B., PEITGEN, H.O., DIETMAR, S. & VOSS, R.F. (1988). The Science of Fractal Images, Peitgen, Heinz-Otto & Saupe, Dietmar (Eds.), pp. 67-69. New York: Springer-Verlag.
2. min calculation. Scanning 23, 193-197.
3. BONETTO, R.D., FORLERER, E. & LADAGA, J.L. (2002). Texture characterization of digital images which have a periodicity or a quasi-periodicity. Measure Sci Technol 13, 1458-1466.
4. BONETTO, R.D. & LADAGA, J.L. (1998). The variogram method for characterization of SEM images. Scanning 20, 457-463.
5. DONG, W.P., SULLIVAN, P.J. & STOUT, K.J. (1994). Comprehensive study of parameters for characterizing third-dimensional surface topography. III: Parameters for characterizing amplitude and some functional properties. Wear 178, 29-43.
6. EINSTEIN, A. (1905). Über die von der molekularkinetischen Theorie der Wärme geforderte Bewegung von in ruhenden Flüssigkeiten suspendierten Teilchen. Ann Phys 322, 549-560. [
7. For an English translation, see A. Einstein, "Investigations on the Theory of Brownian Movement," with notes by R. Furth, translated into English from German by A.D. Cowper, Methuen, London (1926), Dover Publications (1956)
8. .] FEDER, J. (1988). Fractals. New York, London: Plenum Press.
9. KAYE, B. (1989). A Random Walk through Fractal Dimensions. VCH Verlagsgsellschaft mbH. New York, Weinhein, Germany: VCH Publishers.
10. LADAGA, J.L & BONETTO, R.B. (2002). Characterisation of texture in scanning electron microscope images. In Advances in Imaging and Electron Physics, Hawkes, P.W. (Ed.), Vol. 120, pp. 136-189. San Diego, CA: Academic Press.
11. LANE, G.S. (1972). Dimensional measurements. In The Use of the Scanning Electron Microscope, Hearle, J.W.S., Sparrow, J.T. & Cross, P.M. (Eds.), pp. 219-238. New York: Pergamon Press.
12. MANDELBROT, B.B. (1982). The Fractal Geometry of Nature. New York: W.H. Freeman Co.
13. MANDELBROT, B.B., PASSOJA, D.E. & PAULLAY, A.J. (1984). Fractal character of fracture surfaces of metals. Nature 308, 721-722.
14. PONZ, E., LADAGA, J.L. & BONETTO, R.D. (2006). Measuring surface topography with scanning electron microscopy. I. EZEImage: A program to obtain 3D surface data. Microsc Microanal 12, 170-177 (this issue).
15. RUSS, J.C. (1994). Fractal Surfaces. New York, London: Plenum Press.
16. RUSS, J.C. (2002). The Image Processing Handbook, 4th ed. Florida: CRC Press, LLC.
17. RUSS, J.C. & RUSS, J.C. (1987). Feature-specific measurement of surface roughness in SEM images. Part Charact 4, 22-25.
18. SAYLES, R.S. & THOMAS, T.R. (1978). Surface topography as a nonstationary random process. Nature 271, 431-434.
19. SKANDS, U. (1996). Quantitative methods for the analysis of electron microscope images. Ph.D. Thesis, Technical University of Denmark, Institute of Mathematical Modelling, ISNN 0909-3192.
20. SUN, C. (2002). Fast stereo matching using rectangular subregioning and 3D maximum-surfaces techniques. Int J Comput Vision 47, 99-117.
21. THOMAS, T.R., ROSÉN, B.C. & AMINI, N. (1999). Fractal characterization of the anisotropy of rough surfaces. Wear 232, 41-50.
22. VAN PUT, A. (1991). Geochemical and morphological characterization of individual particles from the aqueous environment by EPXMA. Ph.D. Thesis, Universiteit Antwerpen, Universitaire Instelling Antwerpen, Departement Scheikunde, Belgium.