Optical humidity sensitivity of plasma-oxidized nickel oxide films

Solid State Ionics

Volumn 121, Issue 1, 1999, Pages 307-311

  Ando, Masanori ^a   Sato, Yoshiyuki ^a   Tamura, Shigeharu ^a   Kobayashi, Tetsuhiko ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; NICKEL COMPOUNDS; OXIDATION; SENSITIVITY ANALYSIS; THIN FILMS;

OPTICAL HUMIDITY SENSORS; PLASMA-OXIDIZED NICKEL OXIDE FILMS; VISIBLE ABSORBANCE CHANGES;

OPTICAL SENSORS;

EID: 0032674810     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-2738(99)00054-5     Document Type: Article

References (19)

1. Eguchi K. Optical gas sensors. Sberveglieri G. Gas Sensors. 1992;307 Kluwer, Dordrecht.
2. Seitz W.R. Anal. Chem. 56:1984;16A.
3. Ando M., Kobayashi T., Haruta M. Sensors and Actuators B. 32:1996;157.
4. Ando M., Kobayashi T., Haruta M. Proc. of the 6th Int. Meeting on Chemical Sensors, Gaithersburg, MD :1996;. OR-73.
5. Muto S., Fukasawa A., Ogawa T., Morisawa M., Ito H. Jpn. J. Appl. Phys. 29:1990;L1023.
6. Wang K., Seiler K., Haug J.-P., Lehmann B., West S., Hartman K., Simon W. Anal. Chem. 63:1991;970.
7. Sadaoka Y., Matsuguchi M., Sakai Y. J. Electrochem. Soc. 138:1991;614.
8. Sadaoka Y., Sakai Y., Yamada M. J. Mater. Chem. 3:1993;877.
9. Otsuki S., Adachi K. Polym. J. 25:1993;1107.
10. Otsuki S., Adachi K. J. Appl. Polym. Sci. 56:1995;697.
11. Russell A.P., Fletcher K.S. Anal. Chim. Acta. 170:1985;209.
12. Ballantine D.S., Wohltjen H. Anal. Chem. 58:1986;2883.
13. Boltinghouse F., Abel K. Anal. Chem. 61:1989;1863.
14. Otsuki S., Adachi K. J. Appl. Polym. Sci. 48:1993;1557.
15. Zhou Q., Shahriari M.R., Kritz D., Sigel G.H. Jr. Anal. Chem. 60:1988;2317.
16. Ding J.Y., Shahriari M.R., Sigel G.H. Jr. Am. Ceram. Soc. Bull. 70:1991;1513.
17. Murai K., Mihara T., Mochizuki S., Tamura S., Sato Y. Solid State Ionics. 86-88:1996;955.
18. Sato Y., Tamura S., Murai K. Jpn. J. Appl. Phys. 35:1996;6275.
19. Ando M., Kobayashi T., Haruta M. J. Chem. Soc. Faraday Trans. 90:1994;1011.