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Thin Solid Films

Volumn 503, Issue 1-2, 2006, Pages 55-59

Nanostructural and optical features of hydrogenated nanocrystalline silicon films prepared by aluminium-induced crystallization

(4) Shim, J H a Im, Seongil b Kim, Youn Joong c Cho, N H a

a Inha University (South Korea)

b Yonsei University (South Korea)

c Korea Basic Science Institute (KBSI) (South Korea)

Author keywords

Aluminium induced crystallization; Nanocrystallite; Photoluminescence; Si

Indexed keywords

ALUMINUM; AMORPHOUS MATERIALS; CRYSTALLIZATION; FILM PREPARATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SILICON;

ALUMINIUM-INDUCED CRYSTALLIZATION; CRYSTALLIZATION TEMPERATURE; HEAT TREATED FILMS; NANOCRYSTALLITES;

DIELECTRIC FILMS;

EID: 33644746194 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.11.114 Document Type: Article

Times cited : (20)

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