Nanostructural features of nc-Si:H thin films prepared by PECVD

Applied Surface Science

Volumn 234, Issue 1-4, 2004, Pages 268-273

  Shim, J H ^a   Im, Seongil ^b   Cho, N H ^a  

^a Inha University   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Nanocrystallite; PECVD; Photoluminescence; Si; Thin film

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL BONDS; HYDROGEN BONDS; LIQUID CRYSTAL DISPLAYS; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

BAND-GAP BROADENING; EVACUATED REACTION CHAMBER; OPTICAL EMISSION; SURFACE PASSIVATION;

SILICON COMPOUNDS;

EID: 3342955631     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.073     Document Type: Conference Paper

References (18)

1. Guha S., Yang J., Willamson D.L., Lubianiker Y., Cohen J.D., Mahan A.H. Appl. Phys. Lett. 74:1999;1860.
2. Furukawa S. Miyasato. Phys. Rev. B. 38:1988;5726.
3. Takagi H., Ogawa H., Yamazabi Y., Ishizaki A., Nakakiri T. Appl. Phys. Lett. 56:1990;2379.
4. Chen K., Huang X., Xu J., Feng D. Appl. Phys. Lett. 61:1992;2069.
5. Park M.-B., Cho N.-H. Appl. Surf. Sci. 190:2002;151.
6. Matsuda A. Thin Solid Films. 337:1990;1.
7. Nazawa R., Takeda H., Ito M., Hori M., Goto T. J. Appl. Phys. 85:1999;1172.
8. Solomon I., Drevillon B., Shirai H., Layadi N. J. Non-Cryst. Solids. 164:1993;989.
9. Arthur N.L., Miles L.A. Chem. Phys. Lett. 282:1998;192.
10. Tsu R., Gonzalez-Hernandez J., Chao S.S., Lee S.C., Tanak K. Appl. Phys. Lett. 40:1982;534.
11. He Y., Yin C.Y., Cheng G., Wang L., Liu X., Hu G.Y. J. Appl. Phys. 75:1994;797.
12. Jakob P., Chabol Y.J. J. Chem. Phys. 95:1991;2897.
13. Rochet F., Dufour G., Roulet H., Pelloie B., Perriere J., Fogarassy E., Slaoui A., Froment M. Phys. Rev. B. 37:1988;6468.
14. Trwoga P.F., Kenyon A.J., Pitt C.W. J. Appl. Phys. 83:1998;3789.
15. Cullis A.G., Canham L.T. Nature. 353:1991;335.
16. Behrensmeier R., Namavar F., Amisola G.B., Otter F.A., Galligan J.M. Appl. Phys. Lett. 62:1993;2408.
17. Narasimhan K.L., Banerjee S., Srivastava A.K., Sardesai A. Appl. Phys. Lett. 62:1993;331.
18. Trwoga P.F., Kenyon A.J., Pitt C.W. J. Appl. Phys. 83:1998;3789.