The dependence of grain boundary location on low temperature poly-Si thin-film transistors

International Display Manufacturing Conference and Exhibition, IDMC'05

Volumn , Issue , 2005, Pages 55-57

  Chen, Hung Tse ^a   Chen, Yu Cheng ^a   Tsai, Po Hao ^a   Lin, Jia Xing ^a   Chen, Chi Lin ^a   Chang, C Jason ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN BOUNDARIES; LOW TEMPERATURE EFFECTS; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

SUBTHRESHOLD SWING (SS); TRAP DENSITY;

POLYSILICON;

EID: 33644636597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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