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Volumn 5992, Issue 2, 2005, Pages
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Measuring line-edge roughness of masks with DUV light
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Author keywords
E beam writer; LER; Line edge roughness; Mask inspection; Mask quality; Optical metrology
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Indexed keywords
E-BEAM WRITER;
LER;
LINE EDGE ROUGHNESS;
MASK INSPECTION;
MASK QUALITY;
OPTICAL METROLOGY;
ERROR ANALYSIS;
OPTICAL RESOLVING POWER;
PHOTORESISTS;
SURFACE ROUGHNESS;
WSI CIRCUITS;
MASKS;
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EID: 33644593548
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.633184 Document Type: Conference Paper |
Times cited : (5)
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References (2)
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