Nucleation of diamond films by ECR-enhanced microwave plasma chemical vapor deposition

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1410-1413

  Sun, C ^a   Zhang, W J ^a   Lee, C S ^a   Bello, I ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Cyclotron resonance; Diamond films; Heteroepitaxy; Nucleation

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; EPITAXIAL GROWTH; FILM GROWTH; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON;

MICROWAVE PLASMA REACTOR; NUCLEATION DENSITY;

DIAMOND FILMS;

EID: 0032594398     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00011-4     Document Type: Article

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