Characterization of bias enhanced MWCVD diamond thin films

Materials Letters

Volumn 29, Issue 1-3, 1996, Pages 111-115

  Garcia Poza M M ^a   Hernandez Velez M ^b   Jimenez J ^c   Gomez Aleixandre C ^a   Sanchez Olias J ^a   Blanco Montes, A ^a   Albella, J M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b Inst Sup Pedagogico E J Varona   (Cuba)

^c UNIVERSIDAD DE VALLADOLID   (Spain)

Author keywords

Bias nucleation; Diamond thin films; Electric conductivity; MWCVD; Raman spectroscopy; SEM

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; DIAMOND FILMS; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENT MEASUREMENT; FILM GROWTH; NUCLEATION; PHASE COMPOSITION;

DIRECT CURRENT;

THIN FILMS;

EID: 0030289533     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0167-577x(96)00126-7     Document Type: Article

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