High-speed fabrication of super-resolution near-field structure read-only memory master disc using PtOx thermal decomposition lithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 2 B, 2006, Pages 1379-1382

  Kurihara, Kazuma ^a   Yamakawa, Yuzo ^a   Shima, Takayuki ^a   Nakano, Takashi ^a   Kuwahara, Masashi ^a   Tominaga, Junji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

High density optical storage; Master disc fabrication; Super RENS disc; Thermal decomposition; Thermal lithography

Indexed keywords

LITHOGRAPHY; OPTICAL RESOLVING POWER; PLATINUM COMPOUNDS; PYROLYSIS; SIGNAL PROCESSING;

MASTER DISC FABRICATION; SUPER-RENS DISC; THERMAL LITHOGRAPHY;

ROM;

EID: 33644504844     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.45.1379     Document Type: Article

References (13)

1. J. Tominaga, T. Nakano and N. Atoda: Appl. Phys. Lett. 73 (1998) 2078.
2. I. Ichimura, K. Kishima, K. Osato, K. Yamamoto, Y. Kuroda and K. Saito: Jpn. J. Appl. Phys. 39 (2000) 962.
3. D. Day and M. Gu: Appl. Phys. Lett. 80 (2002) 2404.
4. M. Irie, S. Kobatake and M. Horichi: Science 291 (2001) 1769.
5. T. Kikukawa, T. Nakano, T. Shima and J. Tominaga: Appl. Phys. Lett. 81 (2002) 4697.
6. J. Kim, I. Hwang, D. Yoon, I. Park, D. Shin, T. Kikukawa, T. Shima and J. Tominaga: Appl. Phys. Lett. 83 (2003) 1701.
7. J. Tominaga, T. Shima, M. Kuwahara, T. Fukaya, A. Kolobov and T. Nakano: Nanotechnology 15 (2004) 411.
8. D. Yoon, J. Kim, H. Kim, I. Hwang, I. Park, D. Shin, Y. Park and J. Tominaga: Jpn. J. Appl. Phys. 43 (2004) 4945.
9. T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto and J. Ushiyama: Appl. Phys. Lett. 85 (2004) 639.
10. M. Kuwahara, J. Kim, D. Yoon and J. Tominaga: Jpn. J. Appl. Phys. 43 (2004) L1045.
11. W. Y. Hwang, K. G. Lee, C. Yang and I. S. Park: Jpn. J. Appl. Phys. 44 (2005) 3440.
12. M. Kuwahara, J. Kim, P. Fons and J. Tominaga: Microelectron. Eng. 78 (2005) 359.
13. L. Shi, T. Chong, P. K. Tan, X. Hu, J. Li, X. Miao, H. Yuan and H. Yao: Jpn. J. Appl. Phys. 43 (2004) 5001.