Magnetically suspended contact-free linear actuator for precision stage

KSME International Journal

Volumn 17, Issue 5, 2003, Pages 708-717

  Lee, Sang Heon ^a   Baek, Yoon Su ^a  

^a Yonsei University   (South Korea)

Author keywords

Contact free Linear Actuator; Magnetic Circuit; Magnetic Suspension; Precision Stage

Indexed keywords

ELECTROMAGNETISM; LIQUID CRYSTAL DISPLAYS; LUBRICATION; PLASMA DISPLAY DEVICES; SEMICONDUCTOR MATERIALS; THIN FILMS; VACUUM;

CONTACT-FREE LINEAR ACTUATORS; MAGNETIC CIRCUIT; MAGNETIC SUSPENSION; PRECISION STAGE;

ACTUATORS;

EID: 10844263499     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02983866     Document Type: Article

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