Nano-aluminum-induced crystallization of amorphous silicon

Materials Letters

Volumn 60, Issue 11, 2006, Pages 1379-1382

  Zou, Min ^a   Cai, Li ^a   Wang, Hengyu ^a   Brown, William ^a  

^a 3202 Bell Engineering Center   (United States)

Author keywords

Aluminum; Amorphous; Crystallization; Nanometer; Silicon

Indexed keywords

ALUMINUM; ALUMINUM COMPOUNDS; AMORPHOUS SILICON; CRYSTALLIZATION; FABRICATION; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON;

ALUMINUM-INDUCED CRYSTALLIZATION (AIC); NANOMETER; POLYCRYSTALLINE SILICON FILMS;

THIN FILMS;

EID: 33144468393     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2005.11.037     Document Type: Article

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