Pyramidal micromirrors for microsystems and atom chips

Applied Physics Letters

Volumn 88, Issue 7, 2006, Pages

  Trupke, M ^a   Ramirez Martinez, F ^a   Curtis, E A ^a   Ashmore, J P ^a   Eriksson, S ^a   Hinds, E A ^a   Moktadir, Z ^b   Gollasch, C ^b   Kraft, M ^b   Prakash, G Vijaya ^b,c   Baumberg, J J ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^c INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; MICROMIRRORS; OPTOELECTROMECHANICAL SYSTEMS; POTASSIUM HYDROXIDE;

ANISOTROPY; ETCHING; GOLD; LASERS; MAGNETOOPTICAL DEVICES; MICROPROCESSOR CHIPS; OPTICAL DEVICES; OPTOELECTRONIC DEVICES; POTASSIUM COMPOUNDS; SPUTTERING;

SILICON WAFERS;

EID: 32944476186     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2172412     Document Type: Article

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