Production of large-area surface-wave plasmas with an internally mounted planar cylindrical launcher

Plasma Sources Science and Technology

Volumn 15, Issue 1, 2006, Pages 37-41

  Nagatsu, M ^a   Naito, K ^a   Ogino, A ^a   Nanko, S ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Nissin Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC FIELD EFFECTS; MICROWAVES; QUARTZ; SURFACE WAVES; VACUUM;

CAVITY STRUCTURE; CYLINDRICAL PLANAR CAVITY; ELECTROMAGNETIC WAVE SIMULATOR; SURFACE-WAVE PLASMA (SWP);

PLASMAS;

EID: 32844458266     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/15/1/006     Document Type: Article

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