Ultra thin silicon nitride prepared by direct nitridation using ammonia decomposed species

Thin Solid Films

Volumn 501, Issue 1-2, 2006, Pages 157-159

  Izumi, Akira ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Contact angle; NH3; Nitridation; SiN

Indexed keywords

AMMONIA; CONTACT ANGLE; DECOMPOSITION; NITRIDING; SYNTHESIS (CHEMICAL); ULTRATHIN FILMS;

CONTACT ANGLE MEASUREMENTS; DECOMPOSED SPECIES; LAYER THICKNESS; NH3;

SILICON NITRIDE;

EID: 32644440352     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.224     Document Type: Conference Paper

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