Preparation and characterization of pulsed laser deposition (PLD) SiC films

Applied Surface Science

Volumn 252, Issue 10, 2006, Pages 3386-3389

  Tang, Y H ^a,c   Sham, T K ^a   Yang, D ^b   Xue, L ^b  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c HUNAN UNIVERSITY   (China)

Author keywords

Pulsed laser deposition; Si K edge; SiC film

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; CRYSTALLINE MATERIALS; PULSED LASER DEPOSITION; SHELLS (STRUCTURES); SILICON CARBIDE;

SI K-EDGE; SIC FILM;

THIN FILMS;

EID: 32644436400     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.05.031     Document Type: Article

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