Realtime study of plume ejection dynamics in silicon laser ablation under 5 ns pulses

Applied Physics Letters

Volumn 88, Issue 6, 2006, Pages

  Ren, Jun ^a   Yin, Xiaobo ^a   Orlov, Sergei S ^a   Hesselink, Lambertus ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLAST WAVE; PLUME EJECTION DYNAMICS; SILICON LASER ABLATION;

NUCLEATION; REACTION KINETICS; SILICON;

LASER ABLATION;

EID: 32444442560     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2172406     Document Type: Article

References (15)

1. M. C. Gower, Opt. Express 7, 56 (2000).
2. S. I. Anisimov and V. A. Khokhlov, Instabilities in Laser-Matter Interaction (CRC Press, Boca Raton, FL, 1995), Chap., pp. 45 -72.
3. C. G. Morgan, Rep. Prog. Phys. 38, 621 (1975).
4. J. Ren, S. S. Orlov, L. Hesselink, H. Howard, and A. Conneely, Photon Processing in Microelectronics and Photonics III, Proceeding of SPIE, San Jose, CA, edited by, P. R. Herman, J. Fieret, A. Pique, T. Okada, F. G. Bachman, W. Hoving, K. Washio, X. Xu, J. J. Dubowski, D. B. Geohegan, and, F. Trager, (SPIE, Bellingham, WA, 2004), Vol. 5339, pp. 382- 393.
5. M. M. Martynyuk, Zh. Tekh. Fiz. 44, 1262-1270 (1974).
6. Q. Lu, S. S. Mao, X. Mao, and R. Russo, Appl. Phys. Lett. 80, 3072 (2002).
7. M. E. Shannon, B. Rubinsky, and R. E. Russo, J. Appl. Phys. 75, 1473 (1994).
8. S. H. Jeong, R. Greif, and R. E. Russo, J. Phys. D 32, 2578 (1999).
9. L. I. Sedov, Similarity and Dimensional Methods in Mechanics, 10th ed. (CRC Press, Boca Raton, FL, 1993).
10. G. Callies, P. Berger, and H. Hugel, J. Phys. D 28, 794 (1995).
11. R. Kelly, J. Chem. Phys. 92, 5047 (1990).
12. W. Pietsch, B. Dubreuil, and A. Briand, Appl. Phys. B 61, 267 (1995).
13. F. Claeyssens, S. Simon, J. Henley, and M. N. R. Ashfold, J. Appl. Phys. 94, 2203 (2003).
14. B. Burghardt, S. Scheede, R. Senczuk, and H. J. Kahlert, Appl. Phys. A A69, S137 (1999).
15. V. P. Skripov, Metastable Liquids (Wiley, New York, 1974).