Ellipsometry investigation of perovskite/pyrochlore PZT thin film stacks

Ferroelectrics

Volumn 258, Issue 1, 2001, Pages 271-276

  Deineka, A ^a   Glinchuk, M D ^b   Jastrabik, L ^a   Suchaneck, G ^c   Gerlach, G ^c  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^c DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

depth profile; ferroelectric film; interface

Indexed keywords

DEPTH PROFILE; INTERFACE; PLATINUM ELECTRODES; PZT THIN FILM; REFRACTIVE INDEX PROFILES; SPECTRAL ELLIPSOMETER;

ELLIPSOMETRY; FERROELECTRIC DEVICES; FERROELECTRIC FILMS; FERROELECTRICITY; PEROVSKITE; PLATINUM; REFRACTIVE INDEX; THIN FILMS;

DIELECTRIC MATERIALS;

EID: 32444432035     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190108008680     Document Type: Conference Paper

References (16)

1. R. Takayama, Y. Tomita, K. Iijima and I Ueda, Ferroelectrics 118, 325 (1991).
2. I. Kanno, T. Kamada, S. Hayashi, M. Kitagawa and T. Hirao, Jpn. J. Appl. Phys. 32, L950 (1993).
3. S. Nagao, T. Tageuchi and K. Iijima, Jpn. J. Appl. Phys. 32, 1065 (1993).
4. J.-J. Shyu and P.-Ch. Lee, Jpn. J. Appl. Phys. 35, 3954 (1996).
5. A. Seifert, F.F. Lange, J.S. Speck, J. Mat. Res. 10, 680 (1995).
6. R. M. A. Azzam and N. M. Bashara, Ellipsometry and polarized light North-Holland, Amsterdam 1977.
7. F.Abeles, Nat.Bur.Stand. 256, 41 (1963).
8. V.I. Pshenitsin, M.I. Abaev, N.Yu. Lyzlov, Ellipsornetry in physico-chemistry investigations, Chemistry, St.Petersburg, 1986.
9. J. Rivory, Thin Solid Films 313-314,333 (1998).
10. A. Deineka, M. Glinchuk, L. Jastrabik, G. Suchaneck, G. Gerlach, Phys. Stat sol. (a) 175, 443 (1999).
11. A. Dekka, M. Glinchuk, L. Jastrabik, G. Suchaneck, T. Sandner, G. Gerlach, Ferroelectrics (in print).
12. G. Suchaneck, R. Koehler, Th. Sandner, G. Gerlach, A. Deineka, L. Jastrabik, A. I. Kosarev, A. N. Andronov, Integrated Ferroelectrics (in print).
13. G. Suchaneck, T. Sandner, R. Koehler, G. Gerlach, Integrated Ferroelectrics 27, 127 (1998).
14. V.N. Dezik, E. Yu. Kaptelov, S.A. Kukushkin, A.W. Osipov, I.P. Pronin, Fiz. Tverd. Tela 39, 121 (1997).
15. G. Suchaneckk, R. Koehler, P. Padmini, T. Sandner, J. Frey and G. Gerlach, Surface and Coatings Technology 116-119, 1238 (1999).
16. J.A. Voigt, B.A. Tuttle, T.J. Headley, M.O. Eatough, D.L. Lamppa and D. Goodnow, Mat. Res. Symp. Proc. 310, 15 (1993).