Ultrasound emisson characteristics of a thermally induced sound emitter employing a nanocrystalline silicon layer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 5 B, 2004, Pages 2973-2975

  Kihara, Takashi ^a   Harada, Toshihiro ^a   Hirota, Jun ^b   Koshida, Nobuyoshi ^b  

^a YAMATAKE CORPORATION   (Japan)

^b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Electrochemical anodization; Flat frequency response; Nonocrystalline silicon; Thermo acoustic conversion; Ultrasound emitter

Indexed keywords

ACOUSTIC WAVES; ANODIC OXIDATION; NANOSTRUCTURED MATERIALS; THERMAL CONDUCTIVITY; ULTRASONICS; VIBRATIONS (MECHANICAL);

ELECTROCHEMICAL ANODIZATION; FLAT FREQUENCY RESPONSE; NANOCRYSTALLINE SILICON; THERMO-ACOUSTIC CONVERSION; ULTRASOUND EMITTER;

SILICON;

EID: 3242805957     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.2973     Document Type: Conference Paper

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