Fabrication of high-quality-factor photonic crystal microcavities in InAsP/InGaAsP membranes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 875-879

  Srinivasan, Kartik ^a   Barclay, Paul E ^a   Painter, Oskar ^a   Chen, Jianxin ^b   Cho, Alfred Y ^b  

^a California Institute of Technology   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; MAGNETIC FIELDS; MOLECULAR BEAM EPITAXY; PERTURBATION TECHNIQUES; PLASMAS; REACTIVE ION ETCHING; RESONATORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS; SILICA;

DIELECTRIC LATTICES; DIELECTRIC MASKS; FINITE-DIFFERENCE TIME-DOMAIN (FDTD); PHOTONIC CRYSTALS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 3242725202     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1701848     Document Type: Article

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