Determination of the gate dielectric capacitance of ultrathin high-k layers

Journal of the Electrochemical Society

Volumn 151, Issue 7, 2004, Pages

  Kar, Samares ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CAPACITANCE; ELECTRIC CURRENTS; LEAKAGE CURRENTS; MATHEMATICAL MODELS; SILICON; SUBSTRATES; ULTRATHIN FILMS;

EXPONENTIAL FUNCTIONS; EXTRACTION PLOTS; GATE DIELECTRICS; ULTRATHIN LAYERS;

DIELECTRIC MATERIALS;

EID: 3242721607     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1759699     Document Type: Article

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