Optimization of silicon field-emission arrays fabrication for space applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1407-1410

  Wang, Ling ^a   Stevens, Robert ^a   Huq, Ejaz ^a   Loader, Ian ^a   Kent, Barry ^a   Aplin, Karen ^a   She, Juncong ^b  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b SUN YAT SEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ARRAYS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC PROPULSION; ELECTRON EMISSION; FABRICATION; FIELD EMISSION DISPLAYS; GATES (TRANSISTOR); ION BOMBARDMENT; OPTIMIZATION; SPACE APPLICATIONS; STATISTICAL METHODS; THIN FILMS;

CURRENT EMISSION; FIELD-EMISSION ARRAYS; GATE EMITTER ARRAYS;

SILICON WAFERS;

EID: 3242715078     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1736641     Document Type: Conference Paper

References (6)

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