Field emission from ultrathin coatings of AlN on Mo emitters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 50-54

  Kang, D ^a   Zhirnov, V V ^a,b   Sanwald, R C ^a   Hren, J J ^a   Cuomo, J J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b SEMICONDUCTOR RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; ELECTRON EMISSION; MAGNETRON SPUTTERING; MOLYBDENUM; MORPHOLOGY; PROTECTIVE COATINGS; SURFACE TREATMENT; TRANSMISSION ELECTRON MICROSCOPY; ULTRATHIN FILMS;

FOWLER-NORDHEIM ANALYSIS; ULTRATHIN COATINGS;

FIELD EMISSION CATHODES;

EID: 0035083773     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1340669     Document Type: Article

References (10)

1. D. H. Kang, V. V. Zhirnov, G. J. Wojak, E. A. Preble, W. B. Choi, J. J. Hren, and J. J. Cuomo, J. Vac. Sci. Technol. B 17, 632 (1999).
2. V. V. Zhirnov, G. J. Wojak, W. B. Choi, J. J. Cuomo, and J. J. Hren, J. Vac. Sci. Technol. A 15, 1733 (1997).
3. N. Konopsky, V. V. Zhirnov, N. S. Sokolov, J. C. Alvarez, E. I. Givargizov, L. V. Bormatova, V. S. Letokhov, and S. K. Sekatskii, J. Phys. IV 6-C5, 129 (1996).
4. D. P. Malta, G. G. Fountain, J. B. Posthill, T. P. Humphreys, C. Prettenkofer, and R. J. Markunas, Mater. Res. Soc. Symp. Proc. 468, 441 (1997).
5. G. J. Wojak, M. S. thesis, North Carolina State University, 1997.
6. L. K. Cheah, X. Shi, B. K. Tay, S. P. R. Silva, and Z. Sun, Diamond Relat. Mater. 7, 640 (1998).
7. M. Q. Ding, A. R. Krauss, O. Auciello, D. M. Gruen, Y. Huang, V. V. Zhirnov, and E. I. Givargizov, Technical Digest of Twelfth IVMC, 6-9 July 1999, Darmstadt, Germany.
8. D. V. Gerpert, J. Appl. Phys. 33, 2993 (1962).
9. V. V. Zhirnov, C. Lizzul-Rinne, G. J. Wojak, R. C. Sanwald, J. J. Cuomo, and J. J. Hren, J. Vac. Sci. Technol. B 19, 17 (2001).
10. V. V. Zhirnov (unpublished).