Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope

Scanning

Volumn 28, Issue 1, 2006, Pages 27-31

  Wells, Oliver C ^a,c   Gignac, L M ^a   Murray, C E ^a   Frye, A ^b   Bruley, J ^b  

^a IBM RESEARCH   (United States)

^b IBM   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Backscattered electron (BSE); BSE detector; BSE image; Electron back scattering pattern; Scanning electron microscope; Surface topography

Indexed keywords

ARRAYS; BACKSCATTERING; ELECTRONS; POLYCRYSTALLINE MATERIALS; SIGNAL THEORY;

BACKSCATTERED ELECTRON (BSE); BSE DETECTOR; BSE IMAGE; ELECTRON BACK-SCATTERING PATTERN; SCANNING ELECTRON MICROSCOPE;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; CRYSTALLIZATION; CRYSTALLOGRAPHY; ELECTRON; ELECTRON BEAM; IMAGE ANALYSIS; NONHUMAN; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY;

ELECTRONS;

EID: 32344443233     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950280105     Document Type: Article

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