Error evaluation of cosine dependent algorithm in precision interference measurement

Guangxue Xuebao/Acta Optica Sinica

Volumn 25, Issue 12, 2005, Pages 1629-1633

  Luo, Zhiyong ^a   Yang, Lifeng ^a   Chen, Yunchang ^a  

^a NATIONAL INSTITUTE OF METROLOGY   (China)

Author keywords

Cosine dependence; Multiple beam interference; Optical measurement; Phase shifting algorithm; Precision length measurement

Indexed keywords

ALGORITHMS; ERRORS; FABRY-PEROT INTERFEROMETERS; MATHEMATICAL MODELS; MEASUREMENTS; NUMERICAL ANALYSIS; OPTICS;

COSINE DEPENDENCE; MULTIPLE-BEAM INTERFERENCE; OPTICAL MEASUREMENT; PHASE-SHIFTING ALGORITHM; PRECISION LENGTH MEASUREMENT;

LIGHT INTERFERENCE;

EID: 32344432758     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. Wang Liwu, Su Xianyu, Zhou Lipin. Correction algorithm of random phase shifting errors in phase measuring profilometry[J]. Acta Optica Sinica, 2003, 24(5): 614-618 (in Chinese)
2. Li Wansong, Su Likun, Su Xianuu. Phase-measuring profilometry in big scale measurement [J]. Acta Optica Sinica, 2000, 20(6): 792-796 (in Chinese)
3. Jiang Zhenyu, Niao Hong, Zhang Qingchuan et al,. Weighted phase unwrapping based on analysis of intensity modulation for phase-shifting interferometry [J]. Acta Optica Sinica, 2003, 24(8): 1032-1038 (in Chinese)
4. Guo Hongwei, Chen Mingyi, Wei Chunlong. A new algorithm by iterative least squares fitting based on the first order Tayor series expansion in phase shifting interferometry[J]. Acta Optica Sinica, 2001, 21(1): 72-74 (in Chinese)
5. Guanming Lai, Toyohiko Yatagai. Generalized phase-shifting interferometry[J]. J. Opt. Soc. Am. (A), 1991, 8(5): 822-827
6. B. V. Dorrio, J. Blanco-Garcia, C. Lopez et al.. Phase error calculation in a Fizeau interferometer by Fourier expansion of the intensity profile[J]. Appl. Opt., 1996, 35(1): 61-64
7. Yves Surrel. Design of algorithms for phase measurements by the use of phase stepping[J]. Appl. Opt., 1996. 35(1): 51-60
8. P. Hariharan, B. F. Oreb, T. Eiju. Digital phase-stepping interferometry: a simple error-compensating phase calculation [J]. Appl. Opt., 1987, 26(13): 2504-2505
9. G. Bonsch, H. Bohme. Phase-determination of Fizeau interferences by phase-shifting interferometry[J]. Optik, 1989, 82(4): 161-164
10. Chandra S. Vikrarn. Exact phase error effect on contrast measurement in four-step phase-shifting interferometry [J]. Optik, 2000, 111(12): 563-564