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Volumn 85, Issue 6, 2005, Pages 311-323

Effect of mechanical stress on the absorption band tail of cubic boron nitride thin films synthesized by inductively coupled radio-frequency plasma chemical vapour deposition

Author keywords

[No Author keywords available]

Indexed keywords

CUBIC BORON NITRIDE; GRAIN BOUNDARIES; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 32144431973     PISSN: 09500839     EISSN: 13623036     Source Type: Journal    
DOI: 10.1080/09500830500229535     Document Type: Article
Times cited : (2)

References (31)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.