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Volumn 85, Issue 6, 2005, Pages 311-323
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Effect of mechanical stress on the absorption band tail of cubic boron nitride thin films synthesized by inductively coupled radio-frequency plasma chemical vapour deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
CUBIC BORON NITRIDE;
GRAIN BOUNDARIES;
OPTICAL PROPERTIES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
CUBIC NATURE;
CUBIC PHASE FORMATION;
STRESS ANALYSIS;
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EID: 32144431973
PISSN: 09500839
EISSN: 13623036
Source Type: Journal
DOI: 10.1080/09500830500229535 Document Type: Article |
Times cited : (2)
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References (31)
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