Lattice distortion of macrocrystalline cubic boron nitride measured by X-ray diffraction

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 9 A/B, 1997, Pages

  Mieno, Masahiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Bias sputtering; Compressive stress; Cubic boron nitride; Film; X ray diffraction

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; FILMS; RESIDUAL STRESSES; SPUTTERING; STRESS ANALYSIS; SYNTHESIS (CHEMICAL); X RAY CRYSTALLOGRAPHY;

COMPRESSIVE STRESSES; ELASTIC THEORY; MICROCRYSTALLINE MATERIALS;

CUBIC BORON NITRIDE;

EID: 0031223251     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1236     Document Type: Article

References (21)

1. R. H. Wentorf: J. Chem. Phys. 26 (1957) 956.
2. R. C. DeVries: GE CRD Report No. 72CRD178, 1972.
3. B. V. Derjaguin, D. V. Fedoseev, V. M. Lukyanovich, B. V. Spitzin, V. A. Ryabov and A. V. Lavrentyev: J. Cryst. Growth 2 (1968) 380.
4. S. P. S. Arya and A. D'Amico: Thin Solid Films 157 (1988) 267.
5. K. Inagawa, K. Watanabe, H. Ohsone, K. Satoh and A. Itoh: J. Vac. Sci. & Technol. A 5 (1987) 2696.
6. T. Ikeda, Y. Kawate and Y. Hirai: J. Vac. Sci. & Technol. A 8 (1990) 3168.
7. M. Murakawa, S. Watanabe and S. Miyake: Diamond Films and Technol. 1 (1991) 55.
8. T. Wada and N. Yamashita: J. Vac. Sci. & Technol. A 10(3) (1992) 515.
9. T. Ikeda: Appl. Phys. Lett. 61(7) (1992) 786.
10. D. J. Kester and R. Messier: J. Appl. Phys. 72(2) (1992) 504.
11. T. A. Friedmann, P. B. Mikarimi, D. L. Medlin, K. F. McCarty, E. J. Klaus, D. R. Boehme, H. A. Johnsen, M. J. Mills, D. K. Ottesen and J. C. Barbour: J. Appl. Phys. 76(5) (1994) 3088.
12. M. Mieno and Y. Toshida: Jpn. J. Appl. Phys. 29 (1990) L1175.
13. M. Mieno and Y. Toshida: Proc. Jpn. Symp. Plasma Chem. Vol. 3 (1990) 195.
14. M. Mieno and Y. Toshida: Surf. Coat. Technol. 52 (1992) 87.
15. David J. Joyner and David M. Hercules: J. Chem. Phys. 72(3) (1980) 1095.
16. P. J. Gielisse, S. S. Mitra, J. N. Plendl, R. D. Griffis, L. C. Mansur, R. Marshall and E. A. Pascoe: Phys. Rev. 155(3) (1967) 1039.
17. R. Glocker and E. Osswald: Z. Techn. Phys. 16 (1935) 237.
18. J.F. Nye: Physical Properties of Crystals (Oxford Univ. Press, London, 1957).
19. Clarence Zener: Elasticity and Anelasticity of Metals, (The Univ. of Chicago Press, Chicago & London, 1948).
20. V. A. Pesin: Sverkhtverdye Mater. 2 (1980) 5.
21. T. D. Sokolovskii: Izv. Akad. Nauk SSSR, Neorg. Mater. 19 (1983) 1484.