Development of three dimensional LIGA process to fabricate spiral microcoil

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5749-5754

  Mekaru, Harutaka ^a   Kusumi, Shinji ^b   Sato, Noriaki ^c   Shimizu, Masami ^c   Yamashita, Michiru ^d   Shimada, Osamu ^b   Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b SUSUMU Co Ltd   (Japan)

^c Juken Kogyo Co Ltd   (Japan)

^d HYOGO PREFECTURAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

LIGA process; Metallization; Microcoil; Worm injection molding; X ray lithography

Indexed keywords

ELECTROPLATING; INDUCTANCE; INJECTION MOLDING; METALLIZING; X RAY LITHOGRAPHY;

LIGA PROCESS; MICROCOIL; WORM INJECTION MOLDING;

SILICON WAFERS;

EID: 31844449134     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5749     Document Type: Article

References (6)

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