Beam line BL11 for LIGA process at the NewSUBARU

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 467-468, Issue , 2001, Pages 741-744

  Mekaru, Harutaka ^a   Utsumi, Yuichi ^a   Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

HXL; LIGA; Micromachining; Multilayered mirror; PMMA; Synchrotron radiation

Indexed keywords

ETCHING; MICROMACHINING; MIRRORS; PHOTONS; PLASTIC SHEETS; POLYMETHYL METHACRYLATES;

BEAM SPOT SIZE;

SYNCHROTRON RADIATION;

EID: 0035928338     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)00484-3     Document Type: Conference Paper

References (3)