Bonding of lead zirconate titanate ceramics to Si single crystals for microdevices

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 B, 2004, Pages 6672-6674

  Tanaka, Katsuhiko ^a   Konishi, Takahiro ^a   Kuze, Wataru ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Bonding; Lead zirconate titanate; Si

Indexed keywords

BONDING; ETCHING; EVAPORATION; SILICON; SINGLE CRYSTALS; THERMAL EXPANSION; ZIRCONIUM COMPOUNDS;

BONDING STRENGTH; LEAD ZIRCONATE TITANATE (PZT); MICRODEVICES; PIEZOELECTRIC ACTUATORS;

LEAD;

EID: 10444248979     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6672     Document Type: Conference Paper

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