On the choice of a metrological instrument for Synchrotron Radiation optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5921, Issue , 2005, Pages 1-9

  Sostero, G ^a   Cocco, D ^a   Bianco, A ^a  

^a SINCROTRONE TRIESTE   (Italy)

Author keywords

Long Trace Profiler; Optical metrology; Profilometry; X ray optics

Indexed keywords

ERROR ANALYSIS; INFRARED RADIATION; PHOTONS; PROFILOMETRY; ULTRAVIOLET RADIATION;

LONG TRACE PROFILER; OPTICAL METROLOGY;

SYNCHROTRON RADIATION;

EID: 31844433753     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.618270     Document Type: Conference Paper

References (9)

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3. K. Von Bieren, Pencil beam interferometer for aspherical optical surfaces Proc. SPIE 343 (1982) pp. 101-108
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9. D. Cocco, A. Bianco, G. Sostero, A second optic head for the ELETTRA Long Trace Profile, this conference