Synchrotron radiation optics: Quality demands and technical achievability

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4501, Issue , 2001, Pages 24-29

  Sostero, Giovanni ^a   Bianco, Anna ^a   Zangrando, Marco ^a   Cocco, Daniele ^a  

^a SINCROTRONE TRIESTE   (Italy)

Author keywords

LTP; Optical metrology; Profilometry; Surface metrology; X ray optics

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETERS; MIRRORS; PROFILOMETRY; QUALITY CONTROL; STATISTICS; SURFACE ROUGHNESS; SYNCHROTRON RADIATION;

LONG TRACE PROFILER; OPTICAL METROLOGY; OPTICAL QUALITY; SYNCHROTRON RADIATION OPTICS;

X RAY OPTICS;

EID: 0035766168     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448490     Document Type: Conference Paper

References (3)

1. S.-N. Qian, G. Sostero, W. Jark, "The Optical Metrology Laboratory of the Sincrotrone Trieste", Synchrotron Radiation News, 8, No.6, 7-9, 1995
2. G. Sostero, D. Cocco, S.-N. Qian, "Metrological challenges of Synchrotron Radiation Optics", in Optical Fabrication and Testing Proc. SPIE 3739, 310-316, 1999
3. D. Cocco, R. Sergo, G. Sostero, M. Zangrando, High precision measurements of surface diffraction gratings proc. SPIE 2000 Vol. 4146