Surface organic modification of inorganic substrates by plasma deposition of tin oxide organic-like thin films and grafting polymerization

Surface and Coatings Technology

Volumn 200, Issue 10 SPEC. ISS., 2006, Pages 3270-3277

  Chen, Ko Shao ^a   Li, Ming Shu ^a   Wu, Hsin Ming ^a   Yang, Mu Rong ^a   Tian, Ji Yan ^a   Huang, Feng Yi ^a   Hung, Huang Yuan ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

PECVD; SnOx organic like films; TMT and O2 mixtures; UV induced grafting polymerization

Indexed keywords

GRAFTING (CHEMICAL); HYDROPHOBICITY; LOW TEMPERATURE EFFECTS; PHOTOPOLYMERIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE STRUCTURE; THIN FILMS; TIN COMPOUNDS;

GRAFTING POLYMERIZATION; INORGANIC SUBSTRATES; ORGANIC LIKE THIN FILMS; TIN OXIDE;

SURFACE TREATMENT;

GRAFTING (CHEMICAL); HYDROPHOBICITY; LOW TEMPERATURE EFFECTS; PHOTOPOLYMERIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE STRUCTURE; SURFACE TREATMENT; THIN FILMS; TIN COMPOUNDS;

EID: 31644439411     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.07.028     Document Type: Article

References (31)

1. H. Yasuda Plasma Polymerization 1985 Academic Press, Inc. Orando
2. N. Inagaki Plasma Surface Modification and Plasma Polymerization 1996 Technomic Publishing Company Lancaster Basel
3. M. Millard J.R. Hollahan A.T. Bell Techniques and Applications of Plasma Chemistry 1974 Wiley New York Chapter 5
4. E. Kny L.L. Levenson W.J. James R.A. Auerbach Thin Solid Films 85 1981 23
5. N. Inagaki T. Yagi K. Katsuura Eur. Polym. J. 18 7 1982 621
6. E. Kny L.L. Levenson W.J. James R.A. Auerbach Thin Solid Films 64 1979 395
7. TDK Corporation, Jpn. Kokai Tokkyo Koho JP 58, 222, 115, 1983.
8. N. Inagaki M. Mitsuuchi J. Polym. Sci., Polym. Lett. Ed. 22 6 1984 301
9. M. Yamada J. Tamano K. Yoneda S. Morita S. Hattori Jpn. J. Appl. Phys., Part 1 21 5 1982 768
10. J. Watson Sens. Actuators 5 1984 29
11. K. Takahata T. Seiyama Chemical Sensors Technology vol. 1 1988 Elsevier Amsterdam 39
12. L. Sangaletti L.E. Depero A. Dieguez G. Marca J.R. Morante A.R. Rodriguez G. Sberveglieri Sens. Actuators, B 44 1997 268
13. R.K. Sharma P.C.H. Chan Z. Tang G. Yan I.M. Hsing J.K.O. Sin Sens. Actuators, B 72 2001 160
14. K. Ihokura J. Watson The Stannic Oxide Gas Sensor: Principles and Applications 1994 CRC Press Boca Raton, FL
15. V. Brinzari G. Korotcenkov V. Golovanov Thin Solid Films 391 2001 167
16. S.H. Park Y.C. Son W.S. Willis S.L. Suib K.E. Creasy Chem. Mater. 10 1998 2389
17. M. Mwamburi E. Wäckelgård A. Roosb Thin Solid Films 374 2000 1
18. N. Kinjo S. Ohara T. Sugawara S. Tsuchitani Polym. J. 15 15 1983 621
19. Toshihiro Hirotso Shigeru Nakajima J. Appl. Polym. Sci. 36 1988 177
20. Y. Uyama M. Tadokoro Y. Ikada J. Appl. Polym. Sci. 39 1990 489
21. R. d'Agostino Plasma Deposition, Treatment, and Etching of Polymers 1990 Academic Press, Inc. 49
22. Y. Sakai Y. Sadaoka M. Matsuguchi Sens. Actuators, B 35-36 1996 85
23. M.R. Yang K.S. Chen Sens. Actuators, B 49 1998 240
24. K.S. Chen J.C. Tsai C.W. Chou M.R. Yang J.M. Yang Mater. Sci. Eng., C 20 2002 203
25. N. Inagaki T. Yagi K. Katsuura Eur. Polym. J. 18 1982 621
26. N. Inagaki T. Nishio K. Katsuura J. Polym. Sci., Polym. Lett. Ed. 18 1980 765
27. Y. Ide N. Kojima Kobunshi Ronbunshu 44 11 1987 811
28. S.-O. Kim D.-C. Lee Surf. Coat. Technol. 120-121 1999 746
29. H.S. Munro C. Till Thin Solid Films 131, 255 1985
30. R. Larciprete E. Borsella P. De Padova P. Perfetti G. Faglia G. Sberveglieri Thin Solid Films 323 1998 291
31. J. Szuber G. Czempik R. Larciprete B. Adamowicz Sens. Actuators, B 70 2000 177