Heating layer of diamond-like carbon films used for crystallization of silicon films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 10, 2005, Pages 7305-7308

  Sameshima, Toshiyuki ^a   Andoh, Nobuyuki ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Crystallization; DLC; Optical absorbance; Rapid thermal heating

Indexed keywords

CARBON; CRYSTALLIZATION; HEATING; LASER BEAM EFFECTS; SILICON; XENON;

DLC; OPTICAL ABSORBANCE; RAPID THERMAL HEATING;

DIAMOND FILMS;

EID: 31544463573     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7305     Document Type: Article

References (11)

1. S. Uchikoga and N. Ibaraki: Thin Solid Films 383 (2001) 19.
2. S. Inoue, K. Sadao, T. Ozawa, Y. Kobashi, H. Kwai, T. Kitagawa and T. Shimoda: Tech. Dig. IEDM, 2000, p. 197.
3. K. Shibata and H. Takahashi: Proc. Int. Workshop on Active Matrix Liquid Crystal Displays'01, 2001, p. 219.
4. T. Sameshima, S. Usui and M. Sekiya: IEEE Electron Device Lett. 7 (1986) 276.
5. K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko and K. Hotta: IEEE Trans. Electron Devices 36 (1989) 2868.
6. T. Serikawa, S. Shirai, A. Okamoto and S. Suyama: Jpn. J. Appl. Phys. 28 (1989) L1871.
7. A. Kohno, T. Sameshima, N. Sano, M. Sekiya and M. Hara: IEEE Trans. Electron Devices 42 (1995) 251.
8. T. Sameshima and N. Andoh: Proc. Mater. Res. Soc. Symp. 358 (2004) KK9.5.
9. M. Yoshikawa, N. Nagai, M. Matsuki, H. Fukada, G. Katagiri, H. Ishida, A. Ishitani and I. Nagai: Phys. Rev. B 46 (1992) 7169.
10. M. Born and E. Wolf: Principles of Optics (Pergamon, New York, 1974) Chaps, 1 and 13.
11. T. Sameshima, N. Andoh and Y. Andoh: Jpn. J. Appl. Phys. 44 (2005) 1186.