Diamond sensors durable for continuously monitoring intense vacuum ultraviolet radiation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 10, 2005, Pages 7301-7304

  Hayashi, Kazushi ^a   Tachibana, Takeshi ^a   Kawakami, Nobuyuki ^a   Yokota, Yoshihiro ^a   Kobashi, Koji ^a   Ishihara, Hideaki ^b   Uchida, Koji ^b   Nippashi, Kenji ^b   Matsuoka, Mikihiko ^b  

^a KOBE STEEL LTD   (Japan)

^b Iwasaki Electric Co Ltd   (Japan)

Author keywords

Diamond film; Durability; Excimer lamp; Photoconductor; Vacuum ultraviolet

Indexed keywords

DIAMOND FILMS; DIAMONDS; DURABILITY; PHOTOCONDUCTING MATERIALS; ULTRAVIOLET RADIATION; VACUUM; XENON;

EXCIMER LAMPS; VACUUM ULTRAVIOLET;

SENSORS;

EID: 31544457087     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7301     Document Type: Article

References (24)

1. Diamond: Electronic Properties and Applications, eds. L. S. Pan and D. R. Kania (Kluwer Academic. Boston, 1995).
2. F. Foulon, P. Bergonzo, C. Borel, R. D. Marshall, C. Jany, L. Besombes, A. Brambilla, D. Riedel, L. Museur, M.-C. Castsx and A. Gicquel: J. Appl. Phys. 84 (1998) 5331.
3. E. Pace, R. D. Benedetto and S. Scuderi: Diamond Relat. Mater. 9 (2000) 987.
4. J.-F. Hochedez, P. Bergonzo, M.-C. Castex, P. Dhez, O. Hainaut, M. Sacchi, J. Alvarez, H. Boyer, A. Deneuville, P. Gibart, B. Guizard, J.-P. Kleider, P. Lemaire, C. Mer, E. Monroy, E. Muñoz, P. Muret, F. Omnes, J. L. Pau, V. Ralchenko, D. Tromson, E. Verwichte and J.-C. Vial: Diamond Relat. Mater. 10 (2001) 673.
5. M. D. Whitfirld, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi and R. B. Jackman: Diamond Relat. Mater. 10 (2001) 693.
6. M. D. Whitfirld, S. P. Lansley, O. Gaudin, R. D. McKeag, N. Rizvi and R. B. Jackman: Diamond Relat. Mater. 10 (2001) 715.
7. K. Hayashi, Y. Yokota, T. Tachibana, K. Kobashi, J. Achard, A. Gicquel, C. Olivero, M.-C. Castex and A. Treshchalov: Diamond Relat. Mater. 10(2001) 1794.
8. J. Achard, A. Tardieu, A. Kanaev, A. Gicquel, M.-C. Castex, Y. Yokota, K. Hayashi, T. Tachibana and K. Kobashi: Diamond Relat. Mater. 11 (2002) 423.
9. S. P. Lansley, O. Gaudin, H. Ye, N. Rizvi, M. D. Whitfirld, R. D. McKeag and R. B. Jackman: Diamond Relat. Mater. 11 (2002) 433.
10. F. Spaziani, M. C. Rossi, S. Salvatori, G. Conte and P. Ascarelli: Appl. Phys. Lett. 82 (2003) 3785.
11. M.-C. Castex, E. Lefeuvre, J. Achard, A. Tardieu, C. Beuille and H. Schneider: Diamond Relat. Mater. 12 (2003) 1804.
12. K. Uchida, H. Ishihara, K. Nippashi, M. Matsuoka and K. Hayashi: J. Light Vis. Eng. 28 (2004) 25.
13. A. Benmoussa, J.-F. Hochedez, U. Schuehle, K. Haene, M. Nesladek and S. Koizumi: Phys. Status Solidi A 201 (2004) 2536.
14. F. Spaziani, M. C. Rossi, S. Salvatori and G. Conte: Diamond Relat. Mater. 13 (2004) 814.
15. B. R. Stoner and J. T. Glass: Appl. Phys. Lett. 60 (1992) 698.
16. T. Tachibana, K. Hayashi and K. Kobashi: Appl. Phys. Lett. 68 (1996) 1491.
17. S. Yugo, T. Kanai, T. Kimura and T. Muto: Appl. Phys. Lett. 58 (1991) 1036.
18. K. Hayashi, S. Yamanaka, H. Watanabe, T. Sekiguchi, H. Okushi and K. Kajimura: J. Appl. Phys. 81 (1997) 744.
19. T. Saito: unpublished.
20. C. Canali. E. Gatti, S. F. Kozlov, R. F. Manfredi, C. Manfredotti. F. Nava and A. Quirini: Nuclear Instrum. Methods 160 (1979) 73.
21. T. Saito, K. Katori and H. Onuki: Phys. Scr. 41 (1990) 783.
22. R. Korde, C. Prince, D. Cunningham, R. E. Vest and E. Gullikson: Metrologia 40 (2003) S145.
23. Q. Sun and M. Alam: J. Electrochem. Soc. 139 (1992) 933.
24. T. Saito and K. Hayashi: Appl. Phys. Lett. 86 (2005) 122113.