Growth of silicon bump induced by swift heavy ion at the silicon oxide-silicon interface

Applied Physics Letters

Volumn 88, Issue 4, 2006, Pages 1-3

  Carlotti, J F ^a   Touboul, A D ^a   Ramonda, M ^b   Caussanel, M ^c   Guasch, C ^a   Bonnet, J ^a   Gasiot, J ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b UNIV MONTPELLIER   (France)

^c VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SCANNING PROBE MICROSCOPY; SILICON BUMPS; SILICON SURFACES;

INTERFACES (MATERIALS); MELTING; SEMICONDUCTOR GROWTH;

SEMICONDUCTING SILICON;

EID: 31544454966     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2166476     Document Type: Article

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