Blueshift of fluorinated amorphous carbon films by fourier transform infrared spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 11, 2005, Pages 8102-8106

  Oh, Teresa ^a  

^a Chongju University   (South Korea)

Author keywords

a C:F films; Blueshift; C=C bond; Cross link amorphous structure; Cross link breakage structure; Fluorinated amorphous films

Indexed keywords

ATOMS; CARBON; CONDENSATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; PERMITTIVITY;

A-C:F FILMS; BLUESHIFT; C=C BOND; FLUORINATED CARBON FILMS;

AMORPHOUS FILMS;

EID: 31544439086     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.8102     Document Type: Article

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