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Volumn 14, Issue 7, 2004, Pages 867-875

Fine line-width black matrix of a color filter by an advanced polishing method

Author keywords

[No Author keywords available]

Indexed keywords

COLOR; DIFFRACTION; LIQUID CRYSTAL DISPLAYS; MANUFACTURE; MATRIX ALGEBRA; OPTICAL COLLIMATORS; OPTICAL RESOLVING POWER; PATTERN RECOGNITION; POLISHING; PROCESSING; PROXIMITY INDICATORS; ULTRAVIOLET RADIATION;

EID: 3142759970     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/005     Document Type: Article
Times cited : (18)

References (18)
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    • Kitahara H, Colgan E and Schleupen K 2000 Technology trend of large size and high resolution direct-view TFT-LCD SID Digest pp 1108-111
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    • Kitahara, H.1    Colgan, E.2    Schleupen, K.3
  • 5
    • 3142688380 scopus 로고    scopus 로고
    • The exposure machine for low temperature poly-silicon liquid crystal display productions
    • Industrial Investigation Japan
    • Tomohiro K 2000 The exposure machine for low temperature poly-silicon liquid crystal display productions Liquid Crystal Display Technologies 2000 pp 71-5 (Industrial Investigation Japan)
    • (2000) Liquid Crystal Display Technologies 2000 , pp. 71-75
    • Tomohiro, K.1
  • 6
    • 0038654625 scopus 로고    scopus 로고
    • Novel black matrix with high optical density and low reflection
    • Tani M, Sugimura T, Sakagawa M, Ito S and Okano T A novel black matrix with high optical density and low reflection IDW'96 pp 321-4
    • IDW'96 , pp. 321-324
    • Tani, M.1    Sugimura, T.2    Sakagawa, M.3    Ito, S.4    Okano, T.A.5
  • 8
    • 0343369910 scopus 로고    scopus 로고
    • Planarized black matrix on TFT structure for TFT-LCD monitors
    • Kim C W, Ham H R, Rho S G and Lee J H 1997 Planarized black matrix on TFT structure for TFT-LCD monitors SID Digest pp 19-22
    • (1997) SID Digest , pp. 19-22
    • Kim, C.W.1    Ham, H.R.2    Rho, S.G.3    Lee, J.H.4
  • 9
    • 3142739626 scopus 로고    scopus 로고
    • An experimental investigation of chemical mechanical polishing parameters on surface finishing
    • Tso P L and Chang Y C 1999 An experimental investigation of chemical mechanical polishing parameters on surface finishing Int. Conf. on Advanced Manufacturing Technology p 141
    • (1999) Int. Conf. on Advanced Manufacturing Technology , pp. 141
    • Tso, P.L.1    Chang, Y.C.2
  • 10
    • 0026170357 scopus 로고
    • Application of chemical mechanical polishing to the fabrication of VLSI circuit interconnections
    • Patrick W J 1991 Application of chemical mechanical polishing to the fabrication of VLSI circuit interconnections J. Electrochem. Soc. 138 1778-84
    • (1991) J. Electrochem. Soc. , vol.138 , pp. 1778-1784
    • Patrick, W.J.1
  • 11
    • 3142732237 scopus 로고
    • LCD color filter polishing technologies
    • Nakabara 1991 LCD color filter polishing technologies Optronics 7 229-31
    • (1991) Optronics , vol.7 , pp. 229-231
  • 13
    • 3142744041 scopus 로고    scopus 로고
    • A new concept of color filter processes using chemical-mechanical polishing (CMP) technologies
    • Yen T C and Tso P L 2002 A new concept of color filter processes using chemical-mechanical polishing (CMP) technologies The 7th ASID pp 121-4
    • (2002) The 7th ASID , pp. 121-124
    • Yen, T.C.1    Tso, P.L.2
  • 14
    • 0033221865 scopus 로고    scopus 로고
    • Color filter technology for liquid crystal displays
    • R W Sabnis 1999 Color filter technology for liquid crystal displays Displays 20 119-29
    • (1999) Displays , vol.20 , pp. 119-129
    • Sabnis, R.W.1
  • 15
    • 3142751359 scopus 로고    scopus 로고
    • Effects of abrasive particles on the performance of oxide slurry in the CMP process
    • Lu H H et al 1999 Effects of abrasive particles on the performance of oxide slurry in the CMP process Proc. Conf. VLSI Multilevel Interconnection p 231
    • (1999) Proc. Conf. VLSI Multilevel Interconnection , pp. 231
    • Lu, H.H.1
  • 16
    • 0032182764 scopus 로고    scopus 로고
    • Chemical mechanical polishing of polymer film
    • Towery D and Fury M A 1998 Chemical mechanical polishing of polymer film J. Electron. Mater. 27 1088-94
    • (1998) J. Electron. Mater. , vol.27 , pp. 1088-1094
    • Towery, D.1    Fury, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.