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Volumn 120, Issue 24, 2004, Pages 11465-11468
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The anomalous shape of the cross section for the formation of SF 3 + fragment ions produced by electron impact on SF 6 revisited
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Author keywords
[No Author keywords available]
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Indexed keywords
CROSS SECTIONS;
ELECTRON IMPACT;
FRAGMENT IONS;
THRESHOLD ENERGY;
ACCELERATION;
DISSOCIATION;
ELECTRONS;
IONIZATION;
KINETIC ENERGY;
PLASMA ETCHING;
POSITIVE IONS;
SPECTRUM ANALYSIS;
SULFUR COMPOUNDS;
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EID: 3142758031
PISSN: 00219606
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1753553 Document Type: Article |
Times cited : (8)
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References (18)
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