Electron impact ionization cross-sections of SF3 and SF 5

International Journal of Mass Spectrometry

Volumn 233, Issue 1-3, 2004, Pages 111-116

  Huo, W M ^a   Tarnovsky, V ^b   Becker, K ^b  

^a NASA AMES RESEARCH CENTER   (United States)

^b Stevens Institute of Technology   (United States)

Author keywords

Cross sections; Electron ionization; Free radicals; Plasma processing

Indexed keywords

FLUORINE DERIVATIVE; RADICAL;

ARTICLE; BINDING KINETICS; CHEMICAL BOND; DATA ANALYSIS; GEOMETRY; MASS SPECTROMETRY; MOLECULAR INTERACTION; THEORETICAL MODEL; THEORETICAL STUDY;

EID: 2142808708     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2003.12.011     Document Type: Article

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