Nanocrystalline silicon films prepared by laser-induced crystallization

Chinese Physics

Volumn 12, Issue 1, 2003, Pages 75-78

  Fu, Guang Sheng ^a   Yu, Wei ^a   Li, She Qiang ^a   Hou, Hai Hong ^a   Peng, Ying Cai ^a   Li, Han ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

Crystallization; Laser annealing; Nanocrystalline silicon

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; HYDROGEN; LASER BEAM EFFECTS; PULSED LASER DEPOSITION; SURFACE TENSION; TRANSMISSION ELECTRON MICROSCOPY;

GLASS SUBSTRATES; LASER ANNEALING; NANOCRYSTALLINE SILICON; SILICON FILMS;

NANOSTRUCTURED MATERIALS;

EID: 3142751575     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/12/1/313     Document Type: Article

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