New fabrication process for a flexible skin with temperature sensor array and its applications

Acta Mechanica Sinica/Lixue Xuebao

Volumn 20, Issue 2, 2004, Pages 140-145

  Lee, Gwo Bin ^a   Huang, Fu Chun ^a   Lee, Chia Yen ^a   Miau, Jiun Jih ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Flexible skin; MEMS; PCR; Polyimide; Temperature sensors

Indexed keywords

MICROSENSORS; POLYIMIDES; TEMPERATURE MEASUREMENT;

FLEXIBLE SKIN; MICROELECTROMECHANICAL SYSTEMS; POLYMERASE CHAIN REACTION; TEMPERATURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142749615     PISSN: 05677718     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02484257     Document Type: Article

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