Ultra-precision float polishing of calcium fluoride single crystals for deep ultra violet applications

CIRP Annals - Manufacturing Technology

Volumn 53, Issue 1, 2004, Pages 459-462

  Namba, Y ^a   Ohnishi, N ^a   Yoshida, S ^a   Harada, K ^a   Yoshida, K ^b   Matsuo, T ^c  

^a CHUBU UNIVERSITY   (Japan)

^b OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

^c NONE

Author keywords

Atomic surface property; Scanning probe microscopy; Ultra precision polishing

Indexed keywords

CALCIUM COMPOUNDS; CHEMICAL MECHANICAL POLISHING; MACHINING; NANOSTRUCTURED MATERIALS; OPTICAL MATERIALS; STAINLESS STEEL; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; CHEMICAL POLISHING; ELECTRON BEAMS; GRAIN BOUNDARIES; IRRADIATION; MICROSTRUCTURE; PHOTOGRAPHIC FILMS; STRAIN; SURFACE PROPERTIES;

ATOMIC SURFACE PROPERTY; SUBSURFACE DAMAGE; ULTRA-PRECISION FLOAT POLISHING;

SINGLE CRYSTALS;

ATOMIC SURFACE PROPERTY; DEEP ULTRA-VIOLET (DUV) LASERS; SCANNING PROBE MICROSCOPY (SPM); ULTRA-PRECISION POLISHING;

EID: 3142729985     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60739-2     Document Type: Article

References (15)

1. Ewing, J. J., 2003, Excimer Lasers at 30 Years, Optics & Photonics News, 14/5: 26-31.
2. Duley, W. W., 1996, UV Lasers: effects and applications in materials science, Cambridge University Press, Cambridge.
3. Miller, R. E., Bischoff, P., Sumner, R., Bowler, S., Flack, W. W. and Fong, G, 2000, The Development of 157nm Small Field and Mid-Field MicroSteppers, Proc. SPIE, 4000: 567-578.
4. Decker, D. L., Grandjean, D. J. and Bennett, J. M., 1979, Optical and Surface Physical Characteristics of Diamond-Machined Infrared Windows, NBS Spec. Publ., 562: 293-304.
5. Namba, Y. and Tsuwa, H., 1977, Ultra-Fine Finishing of Sapphire Single Crystal. Annals of the CIRP, 26/1: 325-329.
6. Namba, Y. and Tsuwa, H., 1978, Mechanism and Some Applications of Ultra-Fine Finishing, Annals of the CIRP, 27/1: 511-516.
7. Namba, Y. and Tsuwa, H., 1979, A Chemo-Mechanical Ultrafine Finishing of Polycrystalline Materials, Annals of the CIRP, 28/1: 425-429.
8. Namba, Y. and Tsuwa, H., 1980, Float Polishing of Mn-Zn Ferrites and Characteristics of Finished Surfaces, Proc. 4th Int'l Conf. Production Engineering, Tokyo: 1017-1022.
9. Bennett, J. M., Shaffer, J. J., Shibano, Y. and Namba, Y., 1987, Float Polishing of Optical Materials, Appl. Opt., 26/4: 696-703.
10. Namba, Y., Tsuwa, H. and Wada, R., 1987, Ultra-Precision Float Polishing Machine, Annals of the CIRP, 36/1: 211-214.
11. Namba, Y., Takehara, H. and Nagano, Y., 2001, Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components, Annals of the CIRP, 50/1: 239-242.
12. Soares, S. F. and Namba, Y., 2003, Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz, Proc. of the Int'l Conf. on Leading Edge Manufacturing in 21st Century, Niigata, Japan: 15-20.
13. Namba, Y., Wada, R., Unno, K. and Tsuboi, A., 1989, Ultra-Precision Surface Grinder Having a Glass-Ceramic Spindle of Zero-Thermal Expansion, Annals of the CIRP, 38/1: 331-334.
14. Namba, Y., Yu, J., Bennett, J. M. and Yamashita, K., 2000, Modeling and Measurements of Atomic Surface Roughness, Appl. Opt., 39/16: 2705-2718.
15. Lucca, D. A., Brinksmeier, E. and Goch, G., 1998, Progress in Assessing Surface and Subsurface Integrity, Annals of the CIRP, 47/2: 669-693.