Modeling and measurements of atomic surface roughness

Applied Optics

Volumn 39, Issue 16, 2000, Pages 2705-2718

  Namba, Yoshiharu ^a   Yu, Jin ^a,b   Bennett, Jean M ^c   Yamashita, Koujun ^d  

^a CHUBU UNIVERSITY   (Japan)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c NAVAL AIR WARFARE CENTER   (United States)

^d NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALS; MICA; SCANNING TUNNELING MICROSCOPY; SURFACE ROUGHNESS;

ATOMIC TOMOGRAPHY;

TOMOGRAPHY;

EID: 0038711590     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002705     Document Type: Article

References (44)

1. J. Nishizawa, “Molecular layer epitaxy, ” J. Electrochem. Soc. 132, 1197-1200 (1985).
2. Y. Aoyagi, “Atomic-layer growth of GaAs by modulated-continuous-wave laser metalorganic vapor-phase epitaxy, ” J. Vac. Sci. Technol. B 5, 1460-1464 (1987).
3. T. Suntola, “Atomic layer epitaxy, ” Thin Solid Films 216, 84-89 (1992).
4. M. Ishii, S. Iwai, T. Ueki, and Y. Aoyagi, “Reflection-wavelength control method for layer-by-layer controlled x-ray multilayer mirrors, ” Appl. Opt. 36, 2152-2156 (1997);.
5. M. Ishii, S. Iwai, H. Kawata, T. Ueki, and Y. Aoyagi, “Atomic layer epitaxy of aluminum phosphide and its application to x-ray multilayer mirrors, ” J. Cryst. Growth 180, 15-21 (1997).
6. R. A. Dragoset, R. D. Young, H. P. Layer, S. R. Mielczarek, E. C. Teague, and R. J. Celotta, “Scanning tunneling microscopy applied to optical surfaces, ” Opt. Lett. 11, 560-562 (1986).
7. R. A. Dragoset and T. V. Vorburger, “Scanning tunneling microscopy of a diamond-turned surface and a grating replica, ” in Metrology: Figure and Finish, B. Truax, ed., Proc. SPIE 749, 54-58 (1986).
8. J. E. Griffith and D. A. Grigg, “Dimensional metrology with scanning probe microscopes, ” J. Appl. Phys. 74, R83-R109 (1993).
9. J. Yu, L. Hou, W. Sh. Ma, J. L. Cao, J. Y. Yu, and J. E. Yao, “Nanometer characterization of single point diamond-turned mirrors on the micrometer and sub-micrometer scale, ” J. Vac. Sci. Technol. B 12, 1835-1838 (1994).
10. J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, and D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces, ” Appl. Opt. 34, 213-230 (1995).
11. J. M. Bennett, M. M. Tehrani, J. Jahanmir, J. C. Podlesny, and T. L. Balter, “Topographic measurements of supersmooth dielectric films made with a mechanical profiler and a scanning force microscope, ” Appl. Opt. 34, 209-212 (1995).
12. J. Yu, J. L. Cao, Y. Namba, and Y. Y. Ma, “Surface roughness characterization of soft x-ray multilayer films on the nanometer scale, ” J. Vac. Sci. Technol. B 14, 42-47 (1996).
13. G. Binning, H. Rohrer, Ch. Gerber, and E. Weibel, “Surface studies by scanning tunneling microscopy, ” Phys. Rev. Lett. 49, 57-61 (1982).
14. G. Binning, C. F. Quate, and Ch. Gerber, “Atomic force microscope, ” Phys. Rev. Lett. 56, 930-933 (1986).
15. J. Yu and Y. Namba, “Atomic surface roughness, ” Appl. Phys. Lett. 73, 3607-3609 (1998).
16. J. Yu, L. Hou, J. Wei, J. E. Yao, J. L. Cao, and J. Y. Yu, “Scanning tunneling microscope to evaluate supersmooth surface roughness, ” in Current Developments in Optical Design and Optical Engineering II, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 1752, 123-131 (1992).
17. A. S. Povarennykh, Crystal Chemical Classification of Minerals, J. E. S. Bradley, transl. (Plenum, New York, 1972), Vol. 1, p. 42.
18. C. Klein and C. S. Hurlbut, Jr., Manual of Mineralogy, 21st ed. (Wiley, New York, 1993).
19. A. F. Wells, Structural Inorganic Chemistry, 5th ed. (Clarendon, Oxford, 1991).
20. B. Drake, C. B. Prater, A. L. Weisenhorn, S. A. C. Gould, T. R. Albrecht, C. F. Quate, D. S. Cannell, H. G. Hansma, and P. K. Hansma, “Imaging crystals, polymers, and processes in water with the atomic force microscope, ” Science 243, 1586-1589 (1989).
21. T. Sugita and I. Yoshida, “Studies of cleaved surfaces of layered semi-metals, graphite and phyllo-silicates, ” J. Surf. Sci. Soc. Jpn. 16, 664-672 (1995; in Japanese).
22. I. Yoshida, T. Sugita, K. Sasaki, and H. Hori, “Studies of cleaved surfaces of phyllo-silicates (talc, phlogopite and muscovite) by using AFM and LEED, ” J. Surf. Sci. Soc. Jpn. 17, 30-36 (1996; in Japanese).
23. R. Howland and L. Benatar, A Practical Guide to Scanning Probe Microscopy (Park Scientific Instruments, Sunnyvale, Calif., 1993-1996).
24. F. J. Giessibl, “Atomic force microscopy in ultrahigh vacuum, ” Jpn. J. Appl. Phys. 33, 3726-3734 (1994).
25. G. Bining, “Force microscopy, ” Ultramicroscopy 42-44, 7-15 (1992).
26. F. Ohnesorge and G. Binning, “True atomic resolution by atomic force microscopy through repulsive and attractive forces, ” Science 260, 1451-1456 (1993).
27. Y. Sugawara, M. Ohta, H. Ueyama, and S. Morita, “Defect motion on an InP(110) surface observed with noncontact atomic force microscopy, ” Science 270, 1646-1648 (1995).
28. J. Tersoff and D. R. Hamann, “Theory of the scanning tunneling microscope, ” Phys. Rev. 31, 805-813 (1985).
29. S. N. Magonov and M.-H. Wangbo, Surface Analysis with STM and AFM—Experimental and Theoretical Aspects of Image Analysis (Verlagsgesellschaft, Weinheim, Germany, 1996); “Interpreting STM and AFM images” Adv. Mater. 6, 355-371 (1994).
30. J. S. Bendat and A. G. Piersol, Random Data: Analysis and Measurement Procedures (Wiley-Interscience, New York, 1971).
31. Technical Committee ISO/TC 57, International Standard ISO 4287/1, “Surface roughness-terminology. 1. Surface and its parameters, ” (Geneva, Switzerland 1984).
32. R. D. Shannon and C. T. Prewitt, “Effective ionic radii in oxides and fluorides, ” Acta Crystallogr. A 25, 925-946 (1969).
33. R. D. Shannon, “Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides, ” Acta Crystallogr. A 32, 751-767 (1976).
34. L. Pauling, The Nature of the Chemical Bond, 3rd ed. (Cornell U. Press, Ithaca, N.Y., 1960).
35. L. H. Ahrens, “The use of ionization potentials, ” Geochem. Cosmochim. Acta 2, 155-169 (1952).
36. R. E. Grim, Clay Mineralogy, 2nd ed. (McGraw-Hill, New York, 1968).
37. Seiko Instruments, Inc., 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261, Japan.
38. M. Ohta, Y. Sugawara, K. Hontani, S. Morita, F. Osaka, M. Suzuki, H. Nagaoka, S. Mishima, and T. Okada, “Atomically resolved image of cleaved GaAs (110) surface observed with an ultrahigh vacuum atomic force microscope, ” Jpn. J. Appl. Phys. 33, L52-L54 (1994).
39. M. Ohta, H. Ueyama, Y. Sugawara, and S. Morita, “Contrast of atomic-resolution images from a noncontact ultrahigh-vacuum atomic force microscope, ” Jpn. J. Appl. Phys. 34, L1692-L1694 (1995).
40. Y. Sugawara, M. Ohta, H. Ueyama, and S. Morita, “Atomic-resolution imaging of ZnSSe (110) surface with ultrahigh-vacuum atomic force microscope (UHV-AFM), ” Jpn. J. Appl. Phys. 34, L462-L464 (1995).
41. H. J. Nussbaumer, Fast Fourier Transform and Convolution Algorithms (Springer-Verlag, Berlin, 1982);.
42. R. N. Bracewell, The Fourier Transform and Its Applications (McGraw-Hill, New York, 1986).
43. J. M. Elson and J. M. Bennett, “Relation between the angular dependence of scattering and the statistical properties of optical surface, ” J. Opt. Soc. Am. 69, 31-47 (1979).
44. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999).