Fabrication of matrix-addressable micro-LED arrays based on a novel etch technique

Journal of Crystal Growth

Volumn 268, Issue 3-4 SPEC. ISS., 2004, Pages 527-530

  Choi, H W ^a   Jeon, C W ^a   Dawson, M D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

A1. Etching; B1. Nitrides; B3. Light emitting diodes; B3. Microdisplays

Indexed keywords

ANISOTROPY; ARRAYS; ETCHING; FABRICATION; GALLIUM NITRIDE; INDUCTIVELY COUPLED PLASMA;

ANISOTROPIC ETCHING; MICRODISPLAYS;

LIGHT EMITTING DIODES;

EID: 3142718267     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.04.085     Document Type: Conference Paper

References (6)

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3. Jeon C.W., Choi H.W., Dawson M.D. IEEE Photon. Technol. Lett. 15:2003;1516.
4. Choi H.W., Jeon C.W., Martin M.D., Edwards P.R., Martin R.W., Tripathy S. J. Appl. Phys. 93:2003;5978.
5. Choi H.W., Dawson M.D., Edwards P.R., Martin R.W. Appl. Phys. Lett. 83:2003;4483.
6. Choi H.W., Jeon C.W., Dawson M.D. IEEE Electron Dev. Lett. May. 25:2004;277.