Fabrication and performance of two-dimensional matrix addressable arrays of integrated vertical-cavity lasers and resonant cavity photodetectors

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 4, 2002, Pages 943-947

  Geib, Kent M ^b   Choquette, Kent D ^a,c   Serkland, Darwin K ^a,b   Allerman, Andrew A ^b   Hargett, Terry W ^b  

^a IEEE

^b SANDIA NATIONAL LABORATORIES   (United States)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

Integrated VCSELs and detectors; VCSEL arrays

Indexed keywords

ANODES; DEPOSITION; PHOTODETECTORS; REACTIVE ION ETCHING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

INTEGRATED VERTICAL CAVITY LASER; RESONANT CAVITY PHOTODETECTOR; SEMI-INSULATING GALLIUM ARSENIDE SUBSTRATE; TWO-DIMENSIONAL MATRIX ADDRESSABLE ARRAY; VERTICAL CAVITY SURFACE EMITTING LASER;

SEMICONDUCTOR LASERS;

EID: 0036662237     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2002.801691     Document Type: Article

References (9)

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